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"Our company prefers the Minus K vibration isolation platform for use with our SPM/NSOM system. This platform reduces the noise to well below 0.1 nm which is unachievable with any conventional optical table..."
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Newsletter Jul 2026 | Menu of Newsletters

Chip-based Atomic Force Microscopy Sets New Expectations


Minus K Vibration Isolation under a MicroChip Based ICSPI Redux AFM, integrating components such as cantilevers and sensing architecture, into a single microchip using MEMS (micro-electromechanical systems) technology.


Since its commercial introduction in 1985, the atomic force microscope (AFM) has become one of the foremost tools for imaging microstructures on the micrometer and nanometer scale. Capable of revealing sample details down to the atomic level, with resolution on the order of fractions of a nanometer, the AFM is instrumental for imaging in an array of applications, such as in materials science and semiconductor fields, and can even be involved in the manipulation of atoms and nano-sized structures on a variety of surfaces.

The atomic force microscope utilizes a sharp tip (probe), with a radius of curvature on the order of nanometers, attached to the end of a tiny cantilever used to scan across a sample surface to image its topography and material properties. When the tip is brought into proximity of a sample surface, forces between the tip and the surface lead to a deflection of the cantilever. This deflection is recorded using, typically, a laser beam that is reflected from the top surface of the cantilever to a photo-sensitive detector. The resultant change of position of the cantilever permits characteristics, such as mechanical, electrostatic, magnetic, chemical and other forces to be precisely measured by the AFM. These characteristics are displayed in a three-dimensional surface profile of the sample (in the X, Y and Z axes)-an advantage that the microscope can provide compared with other microscopy techniques..

AFM challenges
AFM is widely recognized as a powerful, yet complex and time-consuming technique for nanoscale imaging and measurement. Traditional, legacy AFM requires highly skilled operators and intensive manual labor, operating at slow scanning speeds, to achieve high-resolution nanoscale imaging. Operators often spend significant time manually loading cantilever probes using tweezers and aligning lasers for optical detection.

Manually positioning the probe close enough to the surface without crashing requires skill, patience, and time. Operation often requires specialized PhD-level training to manage tip-sample dynamics of finicky silicon probes and complex tuning to avoid tip crashes or artifacts. New users often struggle with breaking expensive, delicate probes, making training a slow and costly process.

Traditional AFM scanning is slow, often taking several minutes to acquire a single, high-quality image. Because the probe cannot scan and manipulate a sample simultaneously, multi-step modifications are exceptionally slow. Further complicating AFM operation, high-resolution scanning is easily influenced by noise, necessitating repeated scans or intensive post-processing.

Recent advancements in AFM technology
Within the past decade, however, research into AFM design has demonstrated success with improving scanning performance. While traditional AFM remains a demanding technique, these innovations are rapidly making the technology more accessible and faster for users.

Recent developments with AFMs now make possible automated sample probing, laser-free alignment, and one-click motorized approaches to the sample. Researchers are applying deep learning to automate image reconstruction, improve signal-to-noise ratios, and speed up data acquisition.

Of particular interest is the introduction of chip-based AFM. Data collection speeds can now be achieved that are an order of magnitude faster than traditional AFMs, enabling broader use in manufacturing and scientific research.

Chip-based AFM
Chip-based AFM refers to integrating AFM components, like cantilevers and sensing architecture, onto a single microchip using MEMS (micro-electromechanical systems) technology, creating a miniaturized, and more robust system for nanoscale imaging and sensing..

It provides advantages like reduced size, simpler operation, and higher speed. The on-chip design removes the need for manual laser alignment and complex probe exchanges, as sensors and actuators are pre-aligned during manufacturing.

Chip-based AFMs were first commercialized in 2007 by ICSPI, with the goal of bringing fast, powerful, and easy-to-use nanoscale metrology to everyone. The company has pushed the boundaries of nanoscale imaging, and semiconductor metrology and inspection with the introduction of its nGauge and Redux AFM systems.

“Frustrated by the poor versatility, complexity and slow speeds of traditional instruments, ICSPI has been focused on resetting the expectations for nanoscale imaging with intuitive AFM systems,” said Qianshu Wang, Application Engineer at ICSPI. “Our Redux AFM, for example, reduces setup time to as little as three minutes, eliminating manual laser alignment. It is a motorized, automated AFM that can precisely navigate to regions of interest on the sample.”

Sensor-integrated AFM Chip
AFM-on-a-chip technology uses an integrated MEMS actuator and a piezoresistive sensor to move the tip and detect cantilever deflection that provides a fully automatic, one-click approach from the tip to the sample. The precise XYZ scanners and positioning sensors are integrated onto a single 1mm x 2mm chip.

The tip typically oscillates (taps) on the surface, and the changes in oscillation (amplitude, phase) are measured to map topography. The on-chip components provide robust feedback enabling precise tip-sample interaction. “The AFM probes are securely bonded onto the end of a carrier printed circuit board (PCB), making them robust and durable for extended use,” said Wang. “They can be handled by hand, provided the probe itself is not directly contacted or subjected to mechanical stress.”

Two different types of tips are available depending on resolution requirements: a) high-aspect ratio diamond-like carbon (DLC) tips for high-resolution and general-purpose imaging; and b) alumina wedge (WDG) tips for coarse imaging, training and step-height measurements.

Aluminum Wedge (WDG) Tips?
Well suited for coarse imaging, training and step heights. The native oxide (alumina) of aluminum is a low surface energy material. Alumina is a durable material that enables hundreds or thousands of scans without noticeable degradation in scan quality.

Vibration Isolation
Typically, AFMs need to be used in the basements of buildings with a dedicated metrology room to minimize vibrations. The Redux AFM, however, is lighter than traditional AFMs, so it is uninfluenced by much of the low frequency noise that commonly causes issues with AFM scans. However, not all low-frequency vibrations are cancelled out. Redux AFMs still require vibration isolation to guarantee their performance..

For this purpose, ICSPI chose Negative-Stiffness vibration isolators (by Minus K) because they do not require air or electricity, and their compact size and portability makes them a good fit for small-form AFMs in different environments.

Full article...


Minus K Educational Vibration Isolator Giveaway
2022 Winner Research Project


Optical Coherence Elastography - Pushing the Boundaries
of Real-Time Strain and Elasticity Imaging of Biological Tissue


Optical coherence elastography (OCE) holds great promise for detecting and monitoring the altered mechanical properties of strain and elasticity with biological tissue that accompanies many clinical conditions and pathologies, particularly in cancer, cardiovascular disease and eye disease. Researchers at UC Irvine's Beckman Laser Institute are pushing the research envelope with OCE application, with the assistance of Negative-Stiffness vibration isolation.



Tissue exhibits varying degrees of viscoelasticity (time-dependent response to a load), poroelasticity (presence of fluid-filled pores or channels), and anisotropy (a physical property that has a different value when measured in different directions), as well as a nonlinear relationship between elasticity and the applied load.

In establishing the link between elasticity and displacement, simplifying assumptions are usually made about tissue behavior and structure. Most commonly, that tissue is approximated as a linear elastic solid having mechanical properties which have the same value when measured in different directions (isotropic). Optical coherence elastography (OCE), however, has permitted a broader understanding regarding strain and elasticity in biological tissue.

OCE is a non-invasive imaging method for biological tissue, characterized by its niche in intermediate spatial resolution of tens to hundreds of micrometers, about one millimeter of depth penetration, and its high sensitivity to small mechanical changes at the microstrain level.

Optical Coherence Elastography
Elastography is a medical imaging technique used to measure tissue deformation under mechanical loads, enabling the mapping of local mechanical properties. The resulting images are known as elastograms. The term "elastography" has been in use since 1979, and significant advancements have been made in the field, primarily through ultrasound imaging, magnetic resonance imaging, and optical elasticity imaging.

Optical coherence elasticity imaging, one of the earliest optical elasticity methods, utilizes optical coherence tomography (OCT) to detect depth-resolved deformations in samples subjected to compression.

Displacement measurement plays a crucial role in OCE techniques, as tissue deformation often reveals essential mechanical properties. Although traditional OCT provides important diagnostic information, it is often inadequate for early diagnosis when structural deformations are minor.

Phase-sensitive detection is a primary method for detecting tissue deformation, similar to phase-based displacement detection in ultrasound imaging. This involves processing the phase-sensitive OCT signal to determine tissue displacement, followed by strain measurement. Compressional OCE integrates strain data from phase shift with stress applied through compression loading to calculate the elastic modulus, which characterizes the tissue's mechanical properties.

OCE presents new possibilities for various biomedical applications due to its superior resolution and mechanical sensitivity compared to ultrasound and magnetic resonance elastography. One particularly promising application lies in the differentiation between malignant and normal tissues, wherein OCE demonstrates superior contrast compared to conventional structural OCT imaging. There is a strong interest in accelerating OCE visualization for intraoperative use. By leveraging differences in the Young's modulus* of tumor components, OCE can produce images that closely resemble histological images. Unlike traditional histological techniques, which are invasive, time-consuming, and labor-intensive, OCE can be conducted on freshly resected tissue samples and even performed in vivo.

(*Young's modulus is a measure of the ability of a material to withstand changes in length when under lengthwise tension or compression).

OCE Research at UC Irvine's Beckman Laser Institute
Researchers at UC Irvine's Beckman Laser Institute have considerable experience with OCE/OCT possibilities.

According to Fengyi Zhang, Ph.D Graduate Student with the Beckman Laser Institute, "We have focused on two destinations of OCE: a) Visualization of local movement and strains in biological tissue; and b) Visualization of elasticity of the tissue with mechanically produced deformations"

"The OCE technique is operable for a broad class of sufficiently soft biological tissues, even such tissues as cartilage," continued Dr. Zhang. "Previously, obtained strain and elasticity maps for such materials were obtained using mechanical testing. In contrast, OCE enables imaging in real-time."

In ophthalmology, OCE could be utilized to characterize the mechanical properties of the cornea to diagnose related ocular disease. With Dermatology, the elasticity of skin could indicate related pathologies. OCE technology could detect differences in stiffness of human skin layers in vivo. Oncological imaging ex vivo of excised tissues from different sample regions with different stiffness could be highlighted in a 2D depth-resolved elastogram. To improve management of atherosclerosis, OCE could be utilized to monitor the stability of plaque by mechanical characterization of the arterial wall.

Vibration Isolation
Maintaining the micron-level precision needed for the OCE technique at the Beckman Laser Institute was compromised due to low-frequency vibrations originating from the building's air conditioning system, elevator movement and other facility operations.

"We were using an air table to help reduce these low-frequency vibrations, but with little success," explained Dr. Zhang. "Our data sets were being compromised."

"The problem was resolved however, when our laboratory was awarded a complementary Negative-Stiffness vibration isolation platform," said Dr. Zhang, in reference to being a winner of Minus K's Educational Vibration Isolator Giveaway.

Full article...

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The MK52


NASA Telescope Project

How Our Isolators Work


Spacecraft Vibration Isolation On the Ground

Minus K Technology Inc., Vibration Isolation Systems
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