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Microscopy
and Analysis - April 2010
Negative-Stiffness Vibration Isolation in Nanotechnology
is Gaining Popularity
Minus K Technology, Inc., 460 South Hindry Ave, Unit C, Inglewood,
CA 90301 USA www.minusk.com
It wasn't too long ago that making the decision where to
locate your scanning probe microscope was a simple one- put
it in the basement where the ambient vibration was minimized.
But recently, with nanotechnology applications growing exponentially,
scientists and engineers are putting their equipment in a multitude
of locations where vibration noise is significantly high. Additionally,
in an effort to keep their nano-equipment costs as low as possible
by cutting out the peripherals, many academics and industries
are not adequately providing for vibration isolation on their
ultra-sensitive nano-equipment that they are putting into their
facilities. Although high-budget installations typically incorporate
adequate vibration isolation, this is not the case with many
lesser-budget set-ups (those spending under $120,000 for equipment),
which represents the area of most rapid growth in the nanotechnology
universe. It is estimated that 40 -50% of these sites, in both
academia and industry, are initiated with inadequate vibration
isolation.
The above is influenced to some degree by the fact that those
specifying nano-equipment do not always fully grasp the extreme
sensitivity of the instruments, and that they require proper
site selection and vibration isolation. With any type of microscope
or other nano-instrument, even a high-powered optical microscope,
you have got to put noise isolation there or you will end up
with diffused and fuzzy imaging, and sometimes no image at all,
resulting in reduced operability of a facility's nano-equipment.
As instrumentation gets more and more complex, and measurements
are being done at a smaller and smaller level, those vibrations
that are present will start to dominate, and the need for more
effective isolation increases. Isolators have been used since
the beginning with atomic force microscopes in the 1980's, but
there weren't that many AFMs then, and most of them were in
basements. The use of nano-instrumentation has grown dramatically,
and the need for increased isolation has followed that trend.
The vibrations are usually very subtle. What you will not feel
with your hands or feet would cause considerable noise and disturbance
to an AFM or interferometer. The noise is caused by a multitude
of things, it is not just originating from one spot. Every single
building is making noise. Depending on how high up off the ground
you are, and how old the building is, you are going to get a
constant vibration.
Within the building itself you have things that are going to
create even more vibrations, such as the heating and ventilation
system, fans, pumps that are not properly isolated, and elevators.
These mechanical devices create a tremendous amount of vibration
in the building, and depending on how far away the instruments
are from it, they may or may not be adversely affected. External
to the building, your equipment may be influenced by vibrations
from adjacent traffic, wind, construction, and other elements.
These internal and external influences cause lower frequency
vibrations, which raise havoc with nano-instrumentation. The
wind blows and you get a little movement. Just the sway of it
is around 2 Hz, and causes a substantial resonance. A train
near the building can cause movement in the cement slab, nothing
that a viewer would ever feel, but for instrumentation purposes
it has disastrous consequences.
Imagine trying to measure a very few angstroms or nanometers
of displacement, and you have got to have an absolutely stable
surface upon which to rest your instrument. If you don't, any
of that vibration transferred into the mechanical structure
of your instrument will cause vertical noise. And fundamentally,
an inability to measure these kinds of high-resolution features.
An isolator is used to solve a problem, and how bad the problem
is determines the solution you need. Since the 1960'sairtables
have been used for isolation. Basically cans of air, they are
still the most popular isolators used. But, air tables with
resonant frequencies at 2 to 2.5 Hz can typically only handle
vibrations down to about 8 to 10 Hz, not quite low enough for
optimum performance with modern nano-equipment For clarity in
scanning probe microscopes and interferometers, air tables are
an inefficient isolation solution. The air systems have been
adequate up until a few years ago when better isolation was
required.
As some may recall from the early years of nanotechnology, research
scientists were fond of suspending their very expensive AFMs
from bungee cords hanging from the ceiling, and sustained acceptable
vibration isolation. Although some are still employing this
technique, these numbers are dwindling - many aren't willing
to take that risk any longer, and have switched over to other
isolation systems.
One of those is active isolation, also known as electronic force
cancellation. Active isolation uses electronics to sense the
motion, and then puts in equal amounts of motion electronically
to compensate, effectively canceling out the motion. Their efficiency
is fine for application with the latest nanotechnology, as they
can start isolating as low as 0.7 Hz, quite sufficient for isolating
the lower frequencies that are so damaging to image clarity
with SPMs and interferometers.
However, if you can get things mechanically isolated without
having to use energy, such as electricity, then you are inherently
better off. If you don't have to have some form of supplied
energy to run your isolator, then you will not be so negatively
influenced by problems of electronic dysfunctions and power
modulations, which can interrupt scanning.
Negative-stiffness vibration isolation systems have become a
growing choice for nanotechnology applications. Not only are
they a highly workable vibration solution, but their cost is
significantly less - up to one-third the price of active systems-making
it an economical solution to cost-conscious administrators.
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| Figure 3: Schematic of a negative-stiffness
mechanism vibration isolator. A vertical stiffness adjustment
screw is used to regulate the compression force on the
negative-stiffness flexures. A vertical load adjustments
screw raises or lowers the base of the support spring
in response to varying weight loads to keep the flexures
in their straight, unbent operating position. |
Negative-stiffness isolators employ a unique and completely
mechanical concept in low-frequency vibration isolation. Vertical-motion
isolation is provided by a stiff spring that supports a weight
load, combined with a negative-stiff-ness mechanism (NSM). The
net vertical stiffness is made very low without affecting the
static load-supporting capability of the spring. Beam-columns
connected in series with the vertical-motion isolator provide
horizontal-motion isolation. The horizontal stiffness of the
beam-columns is reduced by the 'beam-column' effect (a beam-column
behaves as a spring combined with an NSM.) The result is a compact
passive isolator capable of very low vertical and horizontal
natural frequencies and very high internal structural frequencies.
The isolators (adjusted to 0.5 Hz) achieve 93% isolation efficiency
at 2 Hz; 99% at 5 Hz; and 99.7% at 10 Hz.
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